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1、2020 年深度行业分析研究报告1.32.42.1. 42.2.+. 52.3. 53.73.1. 73.2.14nm202058% . 93.3.28nm. 123.4.643/128. 134.1N144.1. 144.2. 154.3. 224.4. 244.5. 244.6. 254.7. ATESOC264.8. STI274.9. 281.3-4246,8002016/20171 14nmFinFET2019 2019Q41%12nm 202031.602 28nm14nm 2020201991255nm 3642019Q32020 645/20215/64128420199DRA

2、M10nm8Gb DDR4120214nm 011N%25%PVD17%CVD2%CMP14%22%3%01128 1N1387500067%17%10%6%2.2.1.2050AMD20708019872090PC21DRAMPCDRAM 9011950s1960s1970s1980s1990s20PC)/5G/AI/IoTMPU)DRAMASIC&DRAMSOC)20142.2.16/14nm2020 20%2030 2025502514nm 920141,387 5000 2.3.2016/20173-4 246,800

3、1 3. 3.1.10nm-7nm-5nm5GAIIC28nm-14nm-10nm7nm-5nm-3nm7nm-5nm-3nm 20187nm20205nm 7nm2019 7nm355nm2019 20203nm 202063nm105nm201945nm20205nm 20205nm3nm GAAFET3nm2021 GAAFinFET FinFET5nm3nm35% 50%30%20213nm 20223nm 14nm/12nm FinFET22nmFD-SOI2019 12nm FD-SOI16nm FinFET12nm10nm FinFET7nm5nm 3nm14nm/12nm Fi

4、nFET12nmFD-SOI 12nm FD-SOI Intel201910nm10nm7nmIntel Intel intel20217nm 202220237nm+5nm2021 EUVDRAM DRAM2020DDR5 10nm16GB32GB14nmFinFET 1.320192019619A40%(14nm202014nm%)14FinFET 143.5 6000 3.5FinFET202014nm12nm202012nm14nm 28nm14nm 2020 14nm 2019 91255nm 12NANDDRAM 3D NAND 240 30642019 96

5、1282020QL644128C 3D NAND20205/5/8199DRAM1210nm8Gb DDR42020DDR4LPDDR4 DRAM DDR5LPDDR5GDDR6 28nm/14nm7nm/5nm23.2.140.35m2014128nm0.18m 200128 28nm2015314nm FinFET1819112020 2014 202016 14nm 192177nm14nm FinFET12nm FinFET 220010.18m 2012Q328nm 28nm 2013.940nm 2014.128nm 2015.314nm

6、 FinFET 2017.3CEO177nm 14nm FinFET 2018Q22018Q428nm HKC+28nm HKC 14nm FinFET 12nm FinFET %0.2 14nm FinFET %0.3 28nm 2019Q112nm FinFET 2019Q2FinFET N+1 14nm 14nm FinFET 2019.1114nm FinFET 2020Q114nm FinFET 2020Q2A14nm 2018 8447,7502019448,500300mm300mm830 32018Q12018Q22018Q32018Q42019Q12019Q22019Q320

7、19Q42020Q1200mm109,000108,000106,000109,000112,000115,000112,000115,000115,000300mm38,25038,25033,75022,50022,50018,00018,0004,5004,500300mm103,50096,75094,50094,500105,750112,500112,500117,000117,000200mm500,00050,00053,00060,00058,00057,00058,00058,00063,000200mm35,00035,00040,30042,00045,00050,00

8、052,00055,00055,000300mm6,7506,7506,7506,7506,7506,7506,750-65,250300mm72,00074,25074,25074,25081,00084,60092,250112,500-300mm-6,7509,00040,000300mm42,32542,32542,32542,32542,325-476,000 447,750449,075450,875451,325466,575482,575443,850448,500115,00090% 20124.9920192021.94%202031.60 42001

9、5200192020E-6.519.5914.0526.2624.5817.5618.7842.00-84.55%94.49%89.08%97.46%98.81%75.47%93.91%98.59%-1.190.5591.7220.6850.2955.711.2180.60-15.45%5.51%10.92%2.54%1.19%24.53%6.09%1.41%4.997.7010.1415.7726.9524.8823.2720.0042.60100%100%100%100%100%100%100%100%100%90% 201914nm 1%55 65nm031%35%

10、0.15 .185 2018Q12018Q22018Q32018Q42019Q12019Q22019Q32019Q42020Q1 6.80%5.70%7.50%6.40%5.10%4.60%5.60%5.50%5.10% 33.60%40.30%46.30%44.70%43.00%48.90%46.10%44.40%48.90%35.60%37.10%32.50%32.10%32.50%31.10%34.90%38.10%35.40%8.50%7.40%7.50%8.00%9.80%6.70%4.80%3.10%2.90%15.50%9.50%6.20%8.80%9.60%8.70%8.60%

11、8.90%7.70%2018Q12018Q22018Q32018Q42019Q12019Q22019Q32019Q42020Q183.50%90.00%94.40%93.20%94.20%93.90%92.50%91.60%91.10%8.90%16.50%10.00%5.60%6.80%5.80%6.10%7.50%8.40%2018Q12018Q22018Q32018Q42019Q12019Q22019Q32019Q42020Q128.60%33.00%33.00%31.70%32.30%27.50%24.70%22.20%25.50%62.40%58.60%57.90%57.50%53.

12、90%56.90%60.50%65.10%61.60%9.00%8.40%9.10%10.80%13.80%15.60%14.80%12.70%12.90%14nm2018Q12018Q22018Q32018Q42019Q12019Q22019Q32019Q41.00%2020Q11.30%28nm3.20%8.60%7.10%5.40%3.00%3.80%4.30%5.00%6.50%40/45 nm21.70%17.50%18.70%20.30%15.30%19.20%18.50%16.20%14.90%55/65 nm20.90%24.20%21.00%23.00%21.80%26.20

13、%29.30%31.00%32.60%90 nm3.80%1.20%1.40%1.70%2.20%1.70%1.30%1.50%1.60%0.11/0.137.60%7.60%8.70%7.30%7.40%6.50%6.60%6.20%5.40%0.15/0.1838.90%37.10%39.50%38.70%46.00%38.60%35.80%35.00%33.40%0.25/0.353.90%3.80%3.60%3.60%4.30%4.00%4.20%4.10%4.30%209093.3.909 8387 1220181028nm462017.08122018.022018.032018.

14、12F12019.062019.091210025 14122016 12 2018 052018 101228 387 43.4.NAND 7 3D NAND2016.12 2016.12 2017.07 323D NAND 2017.09 2017.11 323D NAND 2018.04202018Q4 323D NAND 2019Q150003000 2019.09 643D NAND 2020.0020Q451N4.4.1.2019597.67.4%134.52.7%2005201923%13% 5%34800 23%20%25%6%15%20%9%7%16%2

15、7%20%6004002006% 7% 6% 6%4%9% 8%11%12%7%13%16%15%15%10%5%00%W23indWind7nm 5nm80% 75% 24%18% 14nm 56SEMISEMISEMI20 5010710087SEMISEM I4.2.01PVDCVDCMP 128 1N13%TEL2017-2020 13%17% -202025%75%0%TEL63%0%16%-2020TEL-202025%75%0%16%21%TEL63%25%AMAT13%TEL2017-20205

16、7%5%-2020TEL 73%52%0%AMAT27%8% 2017-2018TELAMAT2019-2020TEL 39% -202027%TEL AMAT73%6%8%TEL53%AMAT33%TEL74%%-2020TEL94%-20206%TEL94%45%TEL55%2017-2020SML72%ANON28%2017-2018AC38%17%2019-2020ASML62%83%CANON -202038%

17、ASML CANON62%17%ASML CANON83%La2017-2020m Research14%TEL11%AMATScreen7%4%7%-20202019-20204%Lam13%Researchm Research50%59%La15%TELAMATScreen7%2%TEL12%9%AMAT9%5%Screen9%6%-20200%9%7%Lam Research9%TEL50%AMATScreen12%13%2% 4%6%Lam Research5%9%TELAMAT59%Screen15%2017-2020AMA

18、T14%3%-2020 2019-20205%AMAT89%30%5%70%-202030%AMAT70%5%5%AMAT90%56% TELPVD2017-2020PVDAMAT 22%17%6%-2020TEL%50%0%8%33%AMAT 33% 8%212017-2018 PVD222019-2020 PVD33%AMAT67%8%8%AMAT TEL50%34%LaCVD2017-2020CVDTEL32%m Research27% AMAT28%2%11%2017-2018L

19、aLa2019-20200%4% TEL20%42%m ResearchAMATm Research25%AMAT40%232017-2018 CVD242019-2020 CVD0%10%20%TELLam ResearchAMAT40%30%11%4%42%18%TELLam Research AMAT25%ALD2017-2020ALDKOKUSAI ELECTRIC 13%11%50%TEL23%Lam Research 3%2017-2018ALDLam Research2019-2020 KOKUSAI ELECTRICT ELALD 122656%2522017-2018 ALD

20、262019-2020 ALD3%12%3%KOKUSAI ELECTRICTELLam Research56%26%CMP2017-2020AMAT 86%14%-20202019-2020CMP26%-2020 AMAT100%26%AMAT74%2017-2020Screen27%22%Lam Research18%3%31%-20205%0%Lam Research24%9%Screen33%19%19%25%-202019%33%Screen5%Lam Resear

21、ch24%19%19%Screen47%Lam Research25%9%%SEMICS32%CASCADE2%3%-2020SEMICS53%65% SEMICS31%33% CASCADE11%0%-20205%11%SEMICS53%CASCADE31%2%33%SEMICS65%2017-2020NEXTEST20% Advantest21%KLA11%10%39%-2020NEXTEST10%20%Advantest12%28%KLAKLA13%8%11%9%332017-20

22、189%12%NEXTEST SYSTEMAdvantestKLA55%13%11%%29%NEXTEST SYSTEMAdvantest KLA9%8%27%4.3.620149987.24001,387.21,20067%17%10% 6%6%8%100.007.215.000.362015 4.000.2914.5915.001.0811.9824.001.731.900.14201614.501.059.722017 28.302.045.6211.700.849.141.500.1114.5920186.292019 0.040.00- 205.9414.8

23、527.001.95201564.394.6411.30 6.000.432016 43.003.1032.00 116.008.36 18.101.30 14.001.0113.772017 6.000.43 60.004.3332 60.004.3327.04 26.001.87 33.942.4520185.000.36 10.710.77 10.000.72 500.1436.052014 20.311.4619 5.000.362015 10.830.78 18.001.3021.722017 6.800.499.44 16.091.1621.7229.002.091920189.4

24、90.686.17 115.528.332014 4.800.35 0.400.039.852015 1.650.12 6.000.4310.0320169.110.6610.0320191.000.07- 22.961.662015 5.000.363.090.222016 0.050.0011.57 0.220.0220175.500.405.7320180.300.0214.161.02154.4.0214nm011N9 Wind20206294.5.PVDCVD201940.5822.10%3.0932.24%20209.3832.49%0.2633.01%36.41%8.47pct201936.36 20.57%202039.78201940.53%2.15pct2019Q47.57%2.25pct31.9178.64%26.58%35.23%0.51pct8.477.60%59.89%201925.936.100.780.5031.91 8.472.42 PECVDPVD12SiCGaN20195GPERCPVDCVD201912LPCVDPVD 65-28nm14nmHardmask PVDAl-Pad PVDALD209.1+5.9+5IC17.8+2.226.45.4 110%228145/7 32035645088450 4.6.